Four Probe Resistance Tester

Home > Facilities > Characterization & Testing > Testing > Four-Point Probe Tester

Equipment Information Guidelines for Contract Processing Self-use Guidelines Inquiry

Four-Point Probe Tester

Operating

Model：	ResMap 178
Function：	Measurement of resistance and sheet resistance of semiconductors and semiconductor thin films.
Engineer：	Li / +86-21- 34206126-6012 / litq@1
Location：	East Area – Epitaxy / Ion Implantation
Equipment ID：	WDFCFPP01

Reservation

Basic Equipment Information
Operating Principle
Typical Application Case

Main Application

Measurement of resistance and sheet resistance of semiconductors and semiconductor thin films.

Process/Testing Capabilities

Four equally spaced electrical probes make simultaneous contact with the sample. The instrument is specially designed for measuring the sheet resistance (layer resistance) of semiconductor materials. Its automatic multi-point scanning function can be used to investigate the uniformity of sheet resistance or material thickness across the wafer surface.

Technical Specifications

Measurement range: 2 mΩ/square ~ 5 MΩ/square.
Wafer diameter: 50 to 200 mm, capable of measuring irregular silicon wafers.
Equipped with 2D and 3D mapping data analysis functions.
Support automatic export of test data.

The basic principle of the four-probe sheet resistance tester is based on Ohm's Law, which calculates the resistance value by measuring the current and voltage across the sample.

Sheet Resistance Mapping Measurement Result of Coated 4-inch Wafer Sample.

It may cause certain damage to the surface of the test sample.

1. Sample size less than 6 inches, with clean backside and thickness no more than 500 μm. Close the software after use.

2. Do not touch the equipment or operating computer during operation, to avoid accidental shutdown or equipment malfunction caused by misoperation.

3. In case of equipment alarm, please notify the corresponding equipment engineer.

The list below shows FAQs (click a question to view the answer). If your question is not listed, you can leave a message using the link.

FAQs

01

What factors affect the measurement accuracy of the four-point probe tester?

The measurement accuracy is affected by factors such as the contact resistance between the probes and the sample, as well as the uniformity of the sample.

Message Inquiry

If your question is not listed above, please email us at [email protected] or click the button below to submit an inquiry.

Email Inquiry

Note: "@1" represents "@sjtu.edu.cn"