Confocal microscopy is an optical microscopy technique that employs a spatial pinhole to filter out light from out-of-focus planes, so as to improve image contrast and acquire the three-dimensional morphology of specimens.
 

1.Resolution test: For a light-and-dark fringe sample with a period of 24 μm (each fringe width of 0.12 μm), the light-dark contrast of adjacent fringes can be clearly distinguished, verifying that the resolution reaches 0.12 μm.

Fig. 1.1 Resolution standard sample (0.24 μm)

Fig. 1.2 X-direction resolution test result. The light and dark fringes can be distinguished, with a resolution up to 0.12 μm.

Fig. 1.3 Y-direction resolution test result. Light and dark fringes can be distinguished, and the resolution reaches 0.12 μm.

2. Width repeatability test: For a standard stripe sample with a width of 2 μm, the width measurement repeatability is ≤ 10 nm. Test conditions: 50× objective lens, 3 AU, step size of 0.10 μm, 2014 × 512 pixels. The measurement was repeated 10 times, and the stripe width was determined by the gray level full width at half maximum (FWHM).

Fig.2.1 Standard stripe sample with a width of 2 μm (one light-dark period is 2 μm)

Fig. 2.2 Statistical results of 10 repeated measurements