Optical Microscope

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Optical Microscope

Operating

Model：	Axio Scope A1
Function：	Optical Observation of Substrate Surface
Engineer：	Zhang / +86-21- 34206126-6020 / dzlzhangyan@1
Location：	East Area – Lithography IIIB
Equipment ID：	ELT3UPM01

Reservation

Basic Equipment Information
Operating Principle
Typical Application Case

Main Application

Optical microscopes enable rapid and non-destructive observation of sample surfaces, supporting macroscopic defect inspection and process monitoring. Serving as a pre-screening basis, they significantly improve the inspection efficiency in semiconductor manufacturing.

Process/Testing Capabilities

By adopting observation techniques such as bright field and dark field, the contrast can be significantly enhanced to distinguish scratches and particles on the substrate. Combined with a digital imaging system, real-time image acquisition and dimensional measurement can also be realized.

Technical Specifications

The objective lens magnifications include: 5X, 10X, 20X, 50X, 100X.

The basic principle of an optical microscope is to magnify and image tiny objects through the combination of two sets of lenses: the objective lens and the eyepiece.The objective lens magnifies the object and forms an inverted real image, while the eyepiece further magnifies this real image to form an upright virtual image for observation.

Photograph taken with 5X Objective Lens

Sample size is compatible with wafers under 4 inches and broken pieces. Contaminated samples are not accepted; rotate the objective lens turret to switch objective lenses.

Sample size is compatible with specimens below 4 inches and broken pieces. Contaminated samples are not accepted.

Rotate the objective turret to switch objective lenses.

Keep the backside of the sample clean; turn the brightness down to the minimum after use.

Do not touch the equipment or operate the computer while the device is running, so as to avoid accidental shutdown or malfunction caused by misoperation.

In case of any equipment alarm, please notify the corresponding equipment engineer immediately.

The list below shows FAQs (click a question to view the answer). If your question is not listed, you can leave a message using the link.

FAQs

01

Microscope Light Not On

1.Check whether the light source mode, aperture and brightness are normal.

2.Check if the power cord is loose and the socket works properly.

3.Please contact the equipment engineer if replacement with a spare bulb is needed.

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