| Model： | Zeta-20 |
|---|---|
| Function： | Acquire high-resolution 3D scanning data and true-color images of the sample surface |
| Engineer： | Zhang / +86-21- 34206126-6020 / dzlzhangyan@1 |
| Location： | East Area – Thin Film III |
| Equipment ID： | EFM33OP01 |
It enables imaging and analysis of nearly all materials and structures. The ZDot measurement mode simultaneously acquires high-resolution 3D scanning data and true-color images of the sample surface.
The 3D optical profilometer can be used for surface topography and roughness measurement as well as three-dimensional imaging. The equipment is widely applied in the research and development fields of MEMS, semiconductor materials, solar cells, optical components and other related areas.
Sample size: 8 inches and below; sample height shall not exceed 3 cm.
Based on the patented ZDot™ technology, the Zeta-20 enables imaging and analysis of nearly all materials and structures. When a light beam irradiates the sample surface, scattered light is generated. The light is modulated by the surface topography of the sample, resulting in changes to its propagation direction and amplitude. By measuring and analyzing the scattered light, topographic information of the sample surface can be acquired.
Visible light 3D microscope for dimensional measurement of patterned structures and 3D imaging.
Sample size: specimens up to 8 inches in size with a height not exceeding 3 cm; volatile or contaminated samples are not acceptable.
Sample requirements: Sample size shall be 8 inches or less, with a sample height not exceeding 3 cm. Samples with volatility or contamination are not accepted. Keep the backside of samples clean. After use, close the software and turn off the equipment power supply.Do not touch the equipment or the operating computer during operation, so as to avoid accidental operation causing equipment shutdown or malfunction. In case of any equipment alarm, please notify the corresponding equipment engineer immediately.
The visible light 3D microscope can realize large-range imaging by using the stitching function.
Address: 800 Dongchuan Road, Minhang District, Shanghai 200240, China
Tel: +86 21 3420 7734
Email: [email protected]
