Thin Film Property Characterization

UV-Vis spectrophotometer measurement of the reflectance of silicon nitride thin films on silicon:

 

Thin film stress measurement system for evaluating stress distribution in dielectric films

 

High-resolution X-ray diffraction (HRXRD) measurement of the (004) rocking curve of GaAs:

 

Four-point probe measurement of thin film sheet resistance:

 

Cyclic voltammetry (CV) electrochemical measurement of dopant concentration distribution in ion-implanted silicon wafers

 

Wafer surface defect inspection system for measuring particle size distribution on silicon wafer surfaces

 

 

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