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Micro-/Nano Fabrication
  • Copper electroplating tankReservation

    Model：

    Status： Operating

    Function：Copper Electroplating

    East Area – Electroplating+86-21- 34206126-6031
  • Copper ElectroplatingReservation

    Model：µGALV

    Status： Operating

    Function：Copper Electroplating

    East Area – Electroplating+86-21- 34206126-6031
  • Electroplating System TSV CuReservation

    Model：µGALV

    Status： Operating

    Function：Electroplating filling of high aspect ratio structures including silicon blind vias, silicon through vias, glass blind vias and glass through vias

    East Area – Electroplating+86-21- 34206126-6031
  • Gold ElectroplatingReservation

    Model：µGALV

    Status： Operating

    Function：Gold Electroplating

    East Area – Electroplating+86-21- 34206126-6031
  • Nickel ElectroplatingReservation

    Model：µGALV

    Status： Operating

    Function：Nickel Electroplating

    East Area – Electroplating+86-21- 34206126-6031
  • Nickel‑Iron ElectroplatingReservation

    Model：µGALV

    Status： Operating

    Function：Nickel‑Iron Electroplating

    East Area – Electroplating+86-21- 34206126-6031
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SERVICE AND INNOVATION FOR MICRO/NANOTECHNOLOGY

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