Function：High-resolution microscopic morphology observation and micro-area compositional analysis.

Function：Accurately observe the 3D topography of micro-regions (nanometer and submicron scales) on the sample surface; meanwhile, it can scan the electric field/magnetic field distribution, surface potential and other properties of the sample surface.

Function：Observation of Micro-nano Structures and Surface Morphology of Materials and Devices

Function：Acquire high-resolution 3D scanning data and true-color images of the sample surface

Function：It is mainly applied to the structural observation and dimension measurement of micro-nano fabrication samples.

Function：Optical observation of substrate surface