Function：Measurement of depth-dependent doping concentration distribution on silicon wafer surface, with the carrier concentration ranging from 10¹¹ cm⁻³ to 10²¹ cm⁻³.

Function：Measurement of absorbance (A), reflectance (R%) and transmittance (T%) of thin film samples in the wavelength range of 190 nm~2500 nm.

Function：It is mainly used to measure the contact angle on the surface of objects. By testing the water droplet contact angle, key performance indicators such as surface adhesion, bonding property, hydrophobicity and cleanliness of the object can be analyzed and evaluated.

Function：Optical Observation of Substrate Surface

Function：Acquires high-resolution 3D scanning data and true-color images of the sample surface.